Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist.
author、title、journal、volulme page、publication year
Tanii, T., Hosaka, T., Miyake, T., Zhang, G-J., Zako, T., Funatsu, T., Ohdomari, I., “Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist.” Applied Surface Science, 234, 102–106, 2004.
journal URL
https://www.sciencedirect.com/science/article/abs/pii/S016943320400635X